The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Feb. 24, 2014
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
SeokHoon Kim, Seongnam-si, KR;
Yongmyung Jun, Hwaseong-si, KR;
Yongsun Ko, Suwon-si, KR;
Kyoungseob Kim, Suwon-si, KR;
Jung-Min Oh, Incheon, KR;
Kuntack Lee, Suwon-si, KR;
Jihoon Jeong, Gurl-si, KR;
Yong-Jhin Cho, Hwaseong-si, KR;
Abstract
Provided is a substrate treating apparatus including a housing; a plurality of opening-and-closing members configured to provide a driving force for opening and closing the housing; a fluid storing member supplying a fluid to the opening-and-closing members; and a fluid distribution unit connected to the fluid storing member via a supply conduit to distribute the fluid supplied from the fluid storing member to the opening-and-closing members. The fluid distribution unit includes a distribution conduit diverging from the supply conduit and connected to a corresponding one of the opening-and-closing members; and a fluid distribution member provided at a junction between the supply conduit and the distribution conduit.