The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2017

Filed:

Dec. 07, 2015
Applicant:

Thermo Fisher Scientific (Bremen) Gmbh, Bremen, DE;

Inventors:

Michael Deerberg, Bremen, DE;

Michael Krummen, Bad Zwischenahn, DE;

Ronald Seedorf, Weyhe, DE;

Silke Seedorf, Weyhe, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/24 (2006.01); F04D 19/04 (2006.01); F04B 37/14 (2006.01); H01J 49/14 (2006.01);
U.S. Cl.
CPC ...
H01J 49/24 (2013.01); F04B 37/14 (2013.01); H01J 49/147 (2013.01); F04D 19/042 (2013.01);
Abstract

The invention concerns a vacuum system, comprising a first vacuum chamber and a second vacuum chamber, the first vacuum chamber being evacuated by a first vacuum pump, in particular a turbomolecular pump, the first and the second vacuum chamber being connected by a passage, wherein the passage is surrounded by a sealing arrangement comprising an inner seal and an outer seal with a plenum positioned between the inner seal and the outer seal, the plenum being evacuated by a support vacuum pump, and wherein at least one sealing face of the inner seal consists of the wall material of the first or the second vacuum chamber, in particular the inner seal being formed by direct contact between the wall material of the first vacuum chamber and the wall material of the second vacuum chamber. Additionally, the invention concerns a mass spectrometry system.


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