The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2017

Filed:

Jun. 24, 2013
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Naofumi Aoki, Nagoya, JP;

Masafumi Kyogaku, Yokohama, JP;

Kota Iwasaki, Atsugi, JP;

Yohei Murayama, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); H01J 37/26 (2006.01); H01J 49/14 (2006.01); H01J 49/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/261 (2013.01); H01J 49/0004 (2013.01); H01J 49/142 (2013.01); H01J 49/0468 (2013.01); H01J 2237/08 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2602 (2013.01);
Abstract

To provide a mass spectrometer capable of performing high-sensitivity measurement using water molecules. The mass spectrometer has a chamber in which a sample is disposed, an irradiation unit for emitting particles to the sample, and an extraction electrode which leads secondary ions emitted from the sample to a mass spectrometry unit, in which the irradiation unit switches a first mode of emitting primary ions for causing the secondary ions to be emitted from the sample and a second mode of emitting particles containing water molecules to be made to adhere to the sample and emits the particles to the sample.


Find Patent Forward Citations

Loading…