The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Oct. 25, 2011
Eric Peter Goodwin, Tucson, AZ (US);
David Michael Williamson, Tucson, AZ (US);
Daniel Gene Smith, Tucson, AZ (US);
Michel Pharand, Los Gatos, CA (US);
Alexander Cooper, Belmont, CA (US);
Alec Robertson, Palo Alto, CA (US);
Brian L. Stamper, Tucson, AZ (US);
Eric Peter Goodwin, Tucson, AZ (US);
David Michael Williamson, Tucson, AZ (US);
Daniel Gene Smith, Tucson, AZ (US);
Michel Pharand, Los Gatos, CA (US);
Alexander Cooper, Belmont, CA (US);
Alec Robertson, Palo Alto, CA (US);
Brian L. Stamper, Tucson, AZ (US);
Nikon Corporation, Tokyo, JP;
Abstract
An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.