The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 18, 2017

Filed:

Dec. 17, 2014
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Tomohiro Sugimoto, Yoshikawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/41 (2006.01); G01M 11/02 (2006.01);
U.S. Cl.
CPC ...
G01M 11/0271 (2013.01); G01M 11/0285 (2013.01);
Abstract

A refractive index distribution measuring method includes dividing light emitted from a light source into reference light and test light, causing the reference light to interfere with the test light, which test light has passed through a test object, measuring a phase difference between the reference light and the test light for each of first and second wavelengths, and measuring a wavefront aberration of the test light for each of the first and second wavelengths. The refractive index distribution measuring method further includes calculating a phase-difference difference amount, which is a difference between the phase differences for the first wavelength and the second wavelength, calculating a wavefront aberration difference amount, which is a difference between the wavefront aberrations for the first wavelength and the second wavelength, and calculating a refractive index distribution of the test object based on the phase-difference difference amount and the wavefront aberration difference amount.


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