The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Sep. 09, 2013
Applicant:
Oerlikon Surface Solutions Ag, Trubbach, Trubbach, CH;
Inventors:
Mirjam Arndt, Bad Ragaz, CH;
Helmut Rudigier, Bad Ragaz, CH;
Hamid Bolvardi, Aachen, DE;
Jochen Schneider, Aachen, DE;
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON, Pfäffikon SZ, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/06 (2006.01); C23C 14/35 (2006.01); C01B 31/30 (2006.01);
U.S. Cl.
CPC ...
C23C 14/35 (2013.01); C01B 31/301 (2013.01); C23C 14/06 (2013.01);
Abstract
The invention relates to a PVD process for coating a substrate with a layer containing at least one microcrystalline metallic borocarbide phase. During the PVD process, the source output is pulsed such that the at least one peak of which the half intensity width allows conclusions to be drawn about the presence of a microcrystalline phase of the metallic borocarbide layer can be identified in the x-ray spectrum of a layer produced in this way at a substrate temperature below 600° C.