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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9624562 B1

PDFFull Text
Expired
Date of Patent:
Apr. 18, 2017

Filed:

Feb. 27, 2012

Al alloy film for display or semiconductor device, display or semiconductor device having al alloy film, and sputtering target

Applicants:

Hiroyuki Okuno, Kobe, JP;

Toshihiro Kugimiya, Kobe, JP;

Inventors:

Hiroyuki Okuno, Kobe, JP;

Toshihiro Kugimiya, Kobe, JP;

Assignee:

Kobe Steel, Ltd., Kobe-shi, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Roy King

Assistant Examiner:

Janelle Morillo

Int. Cl.
CPC ...
C22C 21/00 (2006.01); C22F 1/04 (2006.01); H01L 21/285 (2006.01); H01L 23/532 (2006.01); H01L 27/12 (2006.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); C23C 14/16 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
C22C 21/00 (2013.01); C22F 1/04 (2013.01); C23C 14/165 (2013.01); C23C 14/185 (2013.01); C23C 14/3414 (2013.01); H01L 21/2855 (2013.01); H01L 23/53219 (2013.01); H01L 27/124 (2013.01); H01L 21/28008 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Provided is an Al alloy film for display devices, which has excellent heat resistance under high temperatures, low electric resistance (wiring resistance), and excellent corrosion resistance under alkaline environments. The present invention relates to an Al alloy film containing Ge (0.01-2.0 at. %) and a group X element (Ta, Ti, Zr, Hf, W, Cr, Nb, Mo, Ir, Pt, Re, and/or Os), wherein, with regard to precipitates each containing Al, the group X element and Ge generated when a heat treatment at 450 to 600° C. is carried out, the density of some of the precipitates which have equivalent circle diameters of 50 nm or more is controlled.

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Okuno, Hiroyuki. (2017). Al alloy film for display or semiconductor device, display or semiconductor device having al alloy film, and sputtering target (U.S. Patent No. 9624562). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9624562

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