The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 2017

Filed:

Aug. 19, 2011
Applicants:

Gen Fujii, Kanagawa, JP;

Erika Takahashi, Kanagawa, JP;

Inventors:

Gen Fujii, Kanagawa, JP;

Erika Takahashi, Kanagawa, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); H01L 21/768 (2006.01); H01L 27/32 (2006.01); H01L 51/05 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0005 (2013.01); H01L 21/76825 (2013.01); H01L 21/76826 (2013.01); H01L 27/3246 (2013.01); H01L 27/3283 (2013.01); H01L 51/0545 (2013.01); H01L 51/56 (2013.01);
Abstract

Oxidation treatment is performed to the surface of a substrate provided with a photocatalytic conductive film and an insulating film; treatment with a silane coupling agent is performed, so that a silane coupling agent film is formed and the surface of the substrate is modified to be liquid-repellent; and the surface of the substrate is irradiated with light of a wavelength (less than to equal to 390 nm) which has energy of greater than or equal to a band gap of a material for forming the photocatalytic conductive film, so that only the silane coupling agent film over the surface of the photocatalytic conductive film is decomposed and the surface of the photocatalytic conductive film can be modified to be lyophilic.


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