The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Sep. 10, 2014
Applicant:
Mossey Creek Technologies Inc., Jefferson City, TN (US);
Inventor:
John Carberry, Talbott, TN (US);
Assignee:
Mossey Creek Technologies, Inc., Jefferson City, TN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); C30B 29/34 (2006.01); B05D 5/12 (2006.01); C30B 29/06 (2006.01); B05D 1/12 (2006.01); B05D 3/02 (2006.01); C30B 33/02 (2006.01); H01L 31/20 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); B05D 1/12 (2013.01); B05D 3/0281 (2013.01); B05D 5/12 (2013.01); C30B 29/06 (2013.01); C30B 29/34 (2013.01); C30B 33/02 (2013.01); C30B 35/002 (2013.01); H01L 21/67 (2013.01); H01L 21/673 (2013.01); H01L 21/67005 (2013.01); H01L 21/67098 (2013.01); H01L 21/67115 (2013.01); H01L 21/67121 (2013.01); H01L 31/182 (2013.01); H01L 31/1804 (2013.01); H01L 31/1824 (2013.01); H01L 31/20 (2013.01); H01L 31/202 (2013.01); H01L 31/208 (2013.01);
Abstract
A tool useful in the manufacture of a semiconductor is disclosed. A mold is providing having an interior defining a planar capillary space. A coating substantially covers at least the planar capillary space of the graphite member. The coating is substantially non-reactive to silicon at temperatures greater than approximately 1420 degrees Centigrade.