The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Mar. 31, 2014
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Scott R. Summerfelt, Garland, TX (US);
Robert G. Fleck, Allen, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); G06F 17/50 (2006.01); H01L 21/66 (2006.01); H01L 27/02 (2006.01); H01L 27/11507 (2017.01);
U.S. Cl.
CPC ...
G06F 17/5072 (2013.01); G06F 17/5068 (2013.01); H01L 22/26 (2013.01); G06F 2217/12 (2013.01); H01L 27/0207 (2013.01); H01L 27/11507 (2013.01); Y02P 90/265 (2015.11);
Abstract
A method of placing a dummy fill layer on a substrate is disclosed (FIG.). The method includes identifying a sub-region of the substrate (). A density of a layer in the sub-region is determined (). A pattern of the dummy fill layer is selected to produce a predetermined density (). The selected pattern is placed in the sub-region ().