The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Nov. 25, 2014
Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;
Akihiro Otaka, Hamamatsu, JP;
Mitsunori Nishizawa, Hamamatsu, JP;
Nobuyuki Hirai, Hamamatsu, JP;
Tomonori Nakamura, Hamamatsu, JP;
HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
A semiconductor device measurement apparatusA includes a testerthat generates an operational pulse signal to be input to a semiconductor devicea light sourcethat generates light, a light branch optical systemthat irradiates the semiconductor device with the light, a light detectorthat detects reflected light obtained by the semiconductor devicereflecting the light, and outputs a detection signal, an analog signal amplifierthat amplifies the detection signal and outputs an amplified signal, and an analysis apparatusthat analyzes an operation of the semiconductor devicebased on the amplified signal and a predetermined correction value, wherein the predetermined correction value is obtained based on a signal obtained by the analog signal amplifieramplifying a signal corresponding to a harmonic of a fundamental frequency of the operational pulse signal.