The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Nov. 07, 2014
Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;
HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
A semiconductor device testing apparatusA includes a tester unitthat generates an operational pulse signal, an optical sensorthat outputs a detection signal as a response to the operational pulse signal, a pulse generatorthat generates a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal, a spectrum analyzerthat receives the detection signal and acquires a phase and amplitude of the detection signal at a detection frequency, a spectrum analyzerthat receives the reference signal and acquires a phase of the reference signal at a detection frequency, and an analysis control unitthat acquires a time waveform of the detection signal based on the phase and the amplitude of the detection signal acquired by the spectrum analyzerand the phase of the reference signal acquired by the spectrum analyzer