The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Dec. 28, 2010
Applicants:
Ekkehard Mueh, Rheinfelden, DE;
Hartwig Rauleder, Rheinfelden, DE;
Rainer Amend, Otzberg, DE;
Martin Hajduk, Goldbach, DE;
Inventors:
Ekkehard Mueh, Rheinfelden, DE;
Hartwig Rauleder, Rheinfelden, DE;
Rainer Amend, Otzberg, DE;
Martin Hajduk, Goldbach, DE;
Assignee:
Evonik Degussa GmbH, Essen, DE;
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); G01N 27/04 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/04 (2013.01); G01N 2033/0095 (2013.01);
Abstract
The invention relates to a method for indirectly determining the purity of silanes and germanes using a device for measuring specific resistance. The invention further relates to a system for industrially producing and/or filling containers with silanes or germanes, including a quality control in which a device is used for measuring specific resistance.