The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 2017

Filed:

Sep. 01, 2015
Applicant:

Piezocryst Advanced Sensorics Gmbh, Graz, AT;

Inventors:

Dietmar Kroeger, Graz, AT;

Peter Schmid, Vienna, AT;

Ulrich Schmid, Vienna, AT;

Alexander Schricker, Graz, AT;

Christof Zarfl, Graz, AT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/04 (2006.01); G01L 1/26 (2006.01); G01L 9/00 (2006.01); G01L 19/04 (2006.01); G01L 1/18 (2006.01); G01L 1/22 (2006.01);
U.S. Cl.
CPC ...
G01L 1/26 (2013.01); G01L 1/18 (2013.01); G01L 1/2287 (2013.01); G01L 9/0052 (2013.01); G01L 19/04 (2013.01);
Abstract

A sensor element () includes a substrate () and a strain-sensitive element () which is preferably applied to the substrate by means of thin-film technology and is used for measuring the deformation of the substrate () when pressure is applied or a force is introduced, the strain-sensitive element () including XAlON, wherein X is a metal with a high melting temperature in the range of greater than 1400° C. and 0<y<0.4 applies. A passivation layer () can be applied to the strain-sensitive element ().


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