The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Jul. 13, 2012
Fucai Zhang, Didcot, GB;
Fucai Zhang, Didcot, GB;
PHASE FOCUS LIMITED, Sheffield, South Yorkshire, GB;
Abstract
Embodiments of the invention provide a method of determining a position of an object with respect to incident radiation, comprising iteratively determining at least one of an object function indicating one or more characteristics of an object and a probe function indicative of one or more characteristics of incident radiation, iteratively determining the position of the object, wherein the iteratively determining the position of the object comprises cross correlating first and second estimates of the object function or the probe function, determining a location of a peak of the cross correlation, and determining a translation deviation indicative of a difference in position of the object between the first and second estimates based on the location of the peak.