The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Mar. 15, 2013
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Cheol Jang, Yongin, KR;
Seung-Hun Kim, Yongin, KR;
Seung-Yong Song, Yongin, KR;
Jin-Kwang Kim, Yongin, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A vapor deposition apparatus including a first region including a first injection unit configured to inject a first raw material, and a second region including a second injection unit configured to inject a second raw material, wherein the second injection unit includes a plasma generation unit, wherein the plasma generation unit includes a plasma generator, a corresponding surface surrounding the plasma generator, and a plasma generation space between the plasma generator and the corresponding surface, and wherein the plasma generator has a groove in a lengthwise direction of the plasma generator.