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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9617188 B1

PDFFull Text
Date of Patent:
Apr. 11, 2017

Filed:

Jul. 15, 2016

Rare-earth oxide based coating

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Jennifer Y. Sun, Mountain View, CA (US);

Biraja P. Kanungo, San Jose, CA (US);

Assignee:

Applied Material, Inc., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Karl Group

Int. Cl.
CPC ...
C04B 35/50 (2006.01); C04B 35/505 (2006.01); C04B 35/626 (2006.01); C04B 37/00 (2006.01); C04B 37/02 (2006.01); H01L 21/687 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01); C04B 35/622 (2006.01); C23C 16/40 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
C04B 35/50 (2013.01); C04B 35/505 (2013.01); C04B 35/62222 (2013.01); C04B 35/62655 (2013.01); C04B 37/001 (2013.01); C04B 37/02 (2013.01); C23C 4/11 (2016.01); C23C 4/134 (2016.01); C23C 16/405 (2013.01); C23C 16/4401 (2013.01); H01J 37/32082 (2013.01); H01L 21/67069 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/6833 (2013.01); H01L 21/68757 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/3418 (2013.01); C04B 2235/656 (2013.01); C04B 2235/96 (2013.01); C04B 2237/34 (2013.01); C04B 2237/341 (2013.01); C04B 2237/348 (2013.01); C04B 2237/40 (2013.01);
Abstract

A solid sintered ceramic article may include YOat a concentration of approximately 40 molar % to approximately 60 molar % and ErOat a concentration of approximately 400 molar % to approximately 60 molar %. An article may include a body and a plasma resistant ceramic coating on at least one surface of the body. The plasma resistant ceramic coating comprising YOat a concentration of approximately 30 molar % to approximately 60 molar %, ErOat a concentration of approximately 20 molar % to approximately 60 molar %, and at least one of ZrO, GdOor SiOat a concentration of over 0 molar % to approximately 30 molar %.

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