The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 04, 2017

Filed:

Mar. 04, 2015
Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Satoshi Wakatsuki, Mie, JP;

Masayuki Kitamura, Mie, JP;

Atsuko Sakata, Mie, JP;

Kyoichi Suguro, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/8238 (2006.01); H01L 21/288 (2006.01); H01L 21/285 (2006.01); H01L 29/45 (2006.01); H01L 21/768 (2006.01); H01L 29/167 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823814 (2013.01); H01L 21/288 (2013.01); H01L 21/28518 (2013.01); H01L 21/28568 (2013.01); H01L 21/76843 (2013.01); H01L 21/76855 (2013.01); H01L 21/823871 (2013.01); H01L 29/456 (2013.01); H01L 21/28556 (2013.01); H01L 29/167 (2013.01);
Abstract

A method of manufacturing a semiconductor device includes forming a first metal containing a first conductivity-type impurity above a substrate provided with a first conductivity-type impurity region containing the first conductivity-type impurity and a second conductivity-type impurity region containing a second conductivity-type impurity; and forming a metal silicide containing the first metal by selectively causing, by thermal treatment, a reaction between the first metal and silicon contained in the substrate in the first conductivity-type impurity region.


Find Patent Forward Citations

Loading…