The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
Jan. 16, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Hisayoshi Furihata, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A pattern having identification features on measurement lines of a multi-slit is projected to an object, and an image is acquired. Based on positions of identification features detected from the image, a measurement line number is identified for each identification feature. Based on a position of a selected identification feature on the image, a position and a slope of an epipolar line in a coordinate system of the pattern are calculated. The position and slope of the epipolar line are calculated by projecting a straight line extending from the position of the selected identification feature to a line-of-sight direction onto the coordinate system. Because the position of the selected identification feature in the coordinate system is on the epipolar line, a measurement line having an identification feature on the epipolar line is searched on the pattern to identify the measurement line number for the selected identification feature.