The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 04, 2017

Filed:

Dec. 29, 2015
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Ryoichi Sataka, Yokohama, JP;

Hisao Osawa, Kawasaki, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/30 (2006.01); G01J 3/44 (2006.01); G01N 21/64 (2006.01); G02B 21/00 (2006.01); G01J 3/02 (2006.01); G01J 3/12 (2006.01);
U.S. Cl.
CPC ...
G01J 3/4406 (2013.01); G01J 3/0205 (2013.01); G01J 3/0208 (2013.01); G01J 3/0237 (2013.01); G01J 3/0256 (2013.01); G01N 21/64 (2013.01); G02B 21/0064 (2013.01); G02B 21/0076 (2013.01); G01J 2003/1243 (2013.01); G01N 21/6458 (2013.01); G01N 2021/6419 (2013.01); G01N 2021/6421 (2013.01);
Abstract

A spectroscope used for a microspectroscopic system includes: a collimating optical system that causes signal light to be substantially collimated light; spectroscopic optical systems and each of which includes at least one of each of spectral elements and in which a wavelength band for spectral separation varies depending on an incident angle of the signal light; at least one of each of optical receivers that detect the signal light spectrally separated by the spectroscopic optical systems; a mechanism that varies the incident angles of the signal light on the spectral elements; and a controller unit that determines the incident angles of the signal light on the spectral elements in accordance with the wavelength band for spectrally separating the signal light and controls the mechanism so as to attain the incident angles.


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