The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
Mar. 14, 2016
Applicant:
Industry-academic Cooperation Foundation, Yonsei University, Seoul, KR;
Inventors:
Hyungjun Kim, Seoul, KR;
Taewook Nam, Seoul, KR;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); C23C 16/448 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/403 (2013.01); C23C 16/405 (2013.01); C23C 16/4488 (2013.01); H01L 21/0228 (2013.01); H01L 21/02181 (2013.01); H01L 21/02183 (2013.01); H01L 21/02186 (2013.01); H01L 21/02189 (2013.01); H01L 21/02205 (2013.01); H01L 21/28556 (2013.01); H01L 21/0262 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01);
Abstract
Disclosed is a method and apparatus for forming a thin oxide film. The method includes reacting metallic precursors with a reactant, which contains an OH radical, to form the thin oxide film on a substrate.