The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
Sep. 20, 2013
Electro Scientific Industries, Inc., Portland, OR (US);
Haibin Zhang, Portland, OR (US);
Fang Shan, San Jose, CA (US);
Mathew Rekow, Santa Cruz, CA (US);
Min Zhang, Fremont, CA (US);
Glenn Simenson, Portland, OR (US);
Qian Xu, Portland, OR (US);
James Brookhyser, Portland, OR (US);
Joe Frankel, Beaverton, OR (US);
Michael Darwin, Portland, OR (US);
Jack Rundel, Portland, OR (US);
Matthew Pysher, Fremont, CA (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.