The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 04, 2017

Filed:

Feb. 06, 2013
Applicant:

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek Tno, Delft, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 13/02 (2006.01); H01L 21/67 (2006.01); B05C 9/08 (2006.01); B05C 9/14 (2006.01); B05D 1/38 (2006.01); B05D 3/02 (2006.01);
U.S. Cl.
CPC ...
B05B 13/0221 (2013.01); B05B 13/0207 (2013.01); B05C 9/08 (2013.01); B05C 9/14 (2013.01); B05D 1/38 (2013.01); B05D 3/0254 (2013.01); H01L 21/6719 (2013.01); H01L 21/67173 (2013.01);
Abstract

A manufacturing facility is provided for manufacturing a product on a foil (FO). The manufacturing facility comprises a deposition zone () formed by a clean room wherein at least a first and a second deposition facility () are arranged for depositing a layer of a material on the foil. The manufacturing facility further comprises at least one processing facility () for processing the deposited layer, said processing facility being arranged outside said deposition zone and comprising a processing trajectory with a first path () away from said deposition zone, towards a turning facility () and with a second path () from said turning facility back towards said deposition zone.


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