The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
May. 29, 2015
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventor:
Keith Laurence Comendant, Fremont, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 13/00 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H02N 13/00 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01);
Abstract
In accordance with this disclosure, there are provided several inventions, including an electrostatic chuck apparatus comprising multiple layers with cutouts that form a labyrinth structure which defined a path for cooling or heating gas. The structure prevents particles from accelerating such that they form unwanted lightup in the gas flow path.