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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9607913 B1

PDFFull Text
Date of Patent:
Mar. 28, 2017

Filed:

Apr. 14, 2016

Low power, temperature regulated circuit for precision integrated circuits

Applicant:

Fluke Corporation, Everett, WA (US);

Inventor:

William J. Britz, Tulalip, WA (US);

Assignee:

FLUKE CORPORATION, Everett, WA (US);

Attorney:

Seed IP Law Group LLP

Primary Examiner:

Brook Kebede

Int. Cl.
CPC ...
H01L 23/58 (2006.01); H01L 21/66 (2006.01); H01L 23/053 (2006.01); H01L 23/08 (2006.01); H01L 23/32 (2006.01); H01L 23/34 (2006.01); H01L 23/498 (2006.01); H01L 21/48 (2006.01); H01L 21/52 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01); H01L 21/4853 (2013.01); H01L 21/52 (2013.01); H01L 22/20 (2013.01); H01L 23/053 (2013.01); H01L 23/08 (2013.01); H01L 23/32 (2013.01); H01L 23/345 (2013.01); H01L 23/49811 (2013.01); H01L 23/49827 (2013.01);
Abstract

Various embodiments provide a temperature regulated circuit. The temperature regulated circuit includes a suspended mass that is positioned in an opening of a frame. The suspended mass is suspended from the frame by a plurality of support beams that may be made of thermally insulating material. The suspended mass provides a thermally isolated substrate for an integrated circuit. The suspended mass also includes a temperature sensor configured to measure a temperature of the integrated circuit, and a heater configured to heat the integrated circuit. A controller is positioned on the frame and is configured to receive temperature measurements from the temperature sensor and control the heater based on the temperature measurements.

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