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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9607905 B1

PDFFull Text
Expired
Date of Patent:
Mar. 28, 2017

Filed:

Sep. 02, 2015

Method of measuring breakdown voltage of semiconductor element and method of manufacturing semiconductor element

Applicant:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Inventors:

Mitsuhiko Sakai, Osaka, JP;

Susumu Yoshimoto, Itami, JP;

Assignee:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Attorneys:

Venable LLP

Michael A. Sartori

F. Brock Riggs

Primary Examiner:

Pamela E Perkins

Int. Cl.
CPC ...
H01L 21/66 (2006.01); G01R 31/26 (2014.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); H01L 21/78 (2013.01);
Abstract

A method of measuring a breakdown voltage of a semiconductor element includes the steps below. A wafer provided with a plurality of semiconductor elements each having an electrode is prepared. The wafer is divided into a plurality of chips provided with at least one semiconductor element. After the step of division into the plurality of chips, a breakdown voltage of the semiconductor element is measured while a probe is in contact with the electrode of the semiconductor element in an insulating liquid.

Find Patent Forward Citations

Sakai, Mitsuhiko. (2017). Method of measuring breakdown voltage of semiconductor element and method of manufacturing semiconductor element (U.S. Patent No. 9607905). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9607905

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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