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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9606519 B1

PDFFull Text
Date of Patent:
Mar. 28, 2017

Filed:

Mar. 24, 2014

Matching process controllers for improved matching of process

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

James Robert Moyne, Canton, MI (US);

Jimmy Iskandar, Fremont, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Lowenstein Sandler LLP

Primary Examiner:

Robert Fennema

Assistant Examiner:

Jennifer L Norton

Int. Cl.
CPC ...
C23C 16/00 (2006.01); F27B 17/00 (2006.01); G03F 7/20 (2006.01); G05B 13/04 (2006.01); G05B 19/418 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H05K 3/00 (2006.01); H05K 13/00 (2006.01); H05K 13/08 (2006.01);
U.S. Cl.
CPC ...
G05B 13/04 (2013.01); G03F 7/705 (2013.01); G03F 7/7065 (2013.01); G03F 7/70608 (2013.01); G03F 7/70616 (2013.01); G03F 7/70625 (2013.01); G05B 19/41875 (2013.01); H01L 21/67155 (2013.01); H01L 21/67253 (2013.01); H01L 22/20 (2013.01); H05K 3/00 (2013.01); C23C 16/00 (2013.01); F27B 17/0025 (2013.01); G03F 7/70633 (2013.01); G03F 7/70683 (2013.01); G05B 2219/2602 (2013.01); G05B 2219/32096 (2013.01); G05B 2219/32097 (2013.01); G05B 2219/45028 (2013.01); G05B 2219/45031 (2013.01); G05B 2219/45032 (2013.01); H05K 13/00 (2013.01); H05K 13/08 (2013.01); Y02P 80/30 (2015.11); Y02P 90/20 (2015.11);
Abstract

Described herein are methods and systems for chamber matching in a manufacturing facility. A method may include receiving a first chamber recipe advice for a first chamber and a second chamber recipe advice for a second chamber. The chamber recipe advices describe a set of tunable inputs and a set of outputs for a process. The method may further include adjusting at least one of the set of first chamber input parameters or the set of second chamber input parameters and at least one of the set of first chamber output parameters or the set of second chamber output parameters to substantially match the first and second chamber recipe advices.

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