The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
Mar. 02, 2015
Applicants:
Kanagawa University, Yokohama, JP;
Nikon Corporation, Tokyo, JP;
Inventor:
Kazuo Yamaguchi, Yokohama, JP;
Assignees:
KANAGAWA UNIVERSITY, Yokohama, JP;
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/075 (2006.01); H01L 21/027 (2006.01); C07C 205/37 (2006.01); C07C 205/45 (2006.01); C07C 49/84 (2006.01); C07F 7/18 (2006.01); G03F 7/16 (2006.01); C07C 49/825 (2006.01); C07C 205/56 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0755 (2013.01); C07C 49/825 (2013.01); C07C 49/84 (2013.01); C07C 205/37 (2013.01); C07C 205/45 (2013.01); C07C 205/56 (2013.01); C07F 7/1836 (2013.01); C07F 7/1852 (2013.01); G03F 7/0046 (2013.01); G03F 7/16 (2013.01); G03F 7/20 (2013.01); G03F 7/2002 (2013.01); H01L 21/0274 (2013.01); G03F 7/0002 (2013.01);
Abstract
A fluorine-containing compound represented by a following general formula (1) is provided. [In the general formula (1), X represents a halogen atom or an alkoxy group, Rrepresents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, and Rand Rrepresent fluorinated alkoxy groups. n represents an integer of 0 or greater.]