The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
Mar. 13, 2014
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Joseph Seeger, Menlo Park, CA (US);
Jin Qiu, Sunnyvale, CA (US);
Matthew Julian Thompson, Beaverton, OR (US);
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/72 (2006.01); G01R 33/02 (2006.01); G01P 15/08 (2006.01); G01R 33/028 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
G01R 33/02 (2013.01); G01P 15/08 (2013.01); G01R 33/0286 (2013.01); B81B 2201/00 (2013.01); H01L 21/00 (2013.01); H01L 2221/00 (2013.01);
Abstract
A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.