The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
Oct. 07, 2016
Applicant:
Yokogawa Electric Corporation, Tokyo, JP;
Inventors:
Assignee:
Yokogawa Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/00 (2006.01); G01J 3/04 (2006.01); G01J 3/42 (2006.01); G01J 3/52 (2006.01); G01N 21/55 (2014.01); G01B 11/14 (2006.01); G01J 3/02 (2006.01); G01J 3/50 (2006.01);
U.S. Cl.
CPC ...
G01B 11/14 (2013.01); G01J 3/0205 (2013.01); G01J 3/42 (2013.01); G01J 3/50 (2013.01); G01B 2210/50 (2013.01);
Abstract
A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.