The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2017

Filed:

Mar. 09, 2012
Applicants:

Tomofumi Susaki, Yokohama, JP;

Hideo Hosono, Yokohama, JP;

Tadahiro Fujihashi, Yokohama, JP;

Yoshitake Toda, Yokohama, JP;

Inventors:

Tomofumi Susaki, Yokohama, JP;

Hideo Hosono, Yokohama, JP;

Tadahiro Fujihashi, Yokohama, JP;

Yoshitake Toda, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 23/02 (2006.01); C30B 23/06 (2006.01); B01D 53/02 (2006.01); C30B 29/16 (2006.01); B01J 20/04 (2006.01); B01J 20/32 (2006.01);
U.S. Cl.
CPC ...
C30B 23/066 (2013.01); B01D 53/02 (2013.01); B01J 20/041 (2013.01); B01J 20/3204 (2013.01); B01J 20/3236 (2013.01); C30B 23/025 (2013.01); C30B 29/16 (2013.01); B01D 2253/1124 (2013.01); B01D 2253/25 (2013.01); B01D 2257/504 (2013.01); Y02C 10/08 (2013.01);
Abstract

A method for depositing a magnesium oxide thin film on a substrate by a laser abrasion method using a sintered body or single crystal of magnesium oxide as a target. In this method, a flat processed film made of magnesium oxide having a (111) plane as its front surface is prepared, using a substrate made of strontium titanate having a (111) plane as its principal surface or yttria-stabilized zirconia having a (111) plane as its principal surface, by directly depositing a film on the principal surface of the substrate and epitaxially growing the film.


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