The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2017

Filed:

May. 30, 2014
Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Yoon-Chan Oh, Yongin-si, KR;

Choong-Ho Lee, Yongin-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/38 (2014.01); G03F 7/12 (2006.01); B23K 26/362 (2014.01); B23K 37/04 (2006.01); B23K 26/10 (2006.01); H01L 51/56 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
B23K 26/38 (2013.01); B23K 26/10 (2013.01); B23K 26/362 (2013.01); B23K 37/0408 (2013.01); G03F 7/12 (2013.01); G03F 7/70733 (2013.01); G03F 7/70783 (2013.01); H01L 51/56 (2013.01);
Abstract

A method of forming a pattern on a mask sheet using a laser beam includes determining a target scan line with respect to the mask sheet, which corresponds to a position of the pattern on a final mask sheet, determining a correction scan line with respect to the mask sheet, along which the laser beam is scanned to form the pattern of the final mask sheet, applying a counter force to the mask sheet, fixing the mask sheet onto a mask frame while the counter force is applied to the mask sheet, scanning the laser beam along the correction scan line, and releasing the counter force which is applied to the mask sheet.


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