The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
Jan. 10, 2014
Arman Hajati, Santa Clara, CA (US);
UT Tran, San Jose, CA (US);
Darren Todd Imai, Los Gatos, CA (US);
Martin Schoeppler, Santa Clara, CA (US);
Arman Hajati, Santa Clara, CA (US);
Ut Tran, San Jose, CA (US);
Darren Todd Imai, Los Gatos, CA (US);
Martin Schoeppler, Santa Clara, CA (US);
FUJIFILM DIMATIX, INC., Lebanon, NH (US);
Abstract
Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.