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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9601649 B1

PDFFull Text
Date of Patent:
Mar. 21, 2017

Filed:

Dec. 11, 2014

Method for producing a microsystem having a thin film made of lead zirconate titanate

Applicant:

Pyreos Ltd., Edinburgh, GB;

Inventors:

Carsten Giebeler, Edinburgh, GB;

Matthias Schreiter, Munich, DE;

Thorsten Steinkopff, Egmating, DE;

Wolfram Wersing, Bergen, DE;

Assignee:

PYREOS LTD., Edinburgh, GB;

Attorney:

Ewers & Hasselmann PLLC

Primary Examiner:

Kyoung Lee

Assistant Examiner:

Joannie A Garcia

Int. Cl.
CPC ...
H01L 21/4763 (2006.01); H01L 31/09 (2006.01); C23C 14/00 (2006.01); C23C 14/02 (2006.01); C23C 14/08 (2006.01); G01J 5/34 (2006.01); H01L 37/04 (2006.01); H01L 41/316 (2013.01); H01L 31/032 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 31/09 (2013.01); C23C 14/0036 (2013.01); C23C 14/025 (2013.01); C23C 14/088 (2013.01); G01J 5/34 (2013.01); H01L 31/032 (2013.01); H01L 31/18 (2013.01); H01L 37/04 (2013.01); H01L 41/316 (2013.01);
Abstract

A method for producing a micro system, said method comprising: providing a substrate () made of aluminum oxide; producing a thin film () on the substrate () by depositing lead zirconate titanate onto the substrate () with a thermal deposition method such that the lead zirconate titanate in the thin film () is self-polarized and is present predominantly in the rhombohedral phase; and cooling down the substrate () together with the thin film ().

Find Patent Forward Citations

Giebeler, Carsten. (2017). Method for producing a microsystem having a thin film made of lead zirconate titanate (U.S. Patent No. 9601649). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9601649

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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