The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2017

Filed:

Dec. 08, 2014
Applicant:

Applicote Llc., Lake Mary, FL (US);

Inventors:

Nathaniel R Quick, Lake Mary, FL (US);

Michael C Murray, Eustis, FL (US);

Assignee:

AppliCote Associates, LLC, Lake Mary, FL (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01); H01L 31/0288 (2006.01); H01L 31/18 (2006.01); H01L 21/24 (2006.01);
U.S. Cl.
CPC ...
H01L 31/0288 (2013.01); H01L 31/1812 (2013.01); H01L 31/1856 (2013.01); H01L 21/242 (2013.01); H01L 21/268 (2013.01);
Abstract

A method and apparatus is disclosed for doping a semiconductor substrate with a dopant concentration greater than 10atoms per cubic centimeter. The method is suitable for producing an improved doped wide bandgap wafer for power electronic devices, photo conductive semiconductor switch, or a semiconductor catalyst.


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