The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
Nov. 05, 2014
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G03B 27/32 (2006.01); G03B 27/52 (2006.01); G03F 7/20 (2006.01); G01N 21/95 (2006.01); G01N 21/94 (2006.01); G03F 9/00 (2006.01); G01S 17/48 (2006.01);
U.S. Cl.
CPC ...
G03F 7/2041 (2013.01); G01N 21/94 (2013.01); G01N 21/9501 (2013.01); G03F 7/7065 (2013.01); G03F 7/70916 (2013.01); G03F 9/7026 (2013.01); G01S 17/48 (2013.01);
Abstract
A foreign substance detection method includes: judging the presence/absence of a foreign substance by measuring a surface condition of a substrate; measuring a surface condition of a second substrate different from the substrate upon replacing the substrate on the chuck with the second substrate, when it is judged in the judging that a foreign substance exists; and determining whether an adhering location of the foreign substance determined to exist in the judging is the substrate, based on a measurement result obtained in the measurement.