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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9599903 B1

PDFFull Text
Expired
Date of Patent:
Mar. 21, 2017

Filed:

Nov. 05, 2014

Foreign substance detection method, foreign substance detection apparatus, exposure method, and method of manufacturing device

Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Tadao Nakamura, Utsunomiya, JP;

Yuji Kosugi, Utsunomiya, JP;

Tomohisa Nakazawa, Nasu-gun, JP;

Assignee:

CANON KABUSHIKI KAISHA, Tokyo, JP;

Attorney:

Rossi, Kimms & McDowell LLP

Primary Examiner:

Colin Kreutzer

Int. Cl.
CPC ...
G01N 21/00 (2006.01); G03B 27/32 (2006.01); G03B 27/52 (2006.01); G03F 7/20 (2006.01); G01N 21/95 (2006.01); G01N 21/94 (2006.01); G03F 9/00 (2006.01); G01S 17/48 (2006.01);
U.S. Cl.
CPC ...
G03F 7/2041 (2013.01); G01N 21/94 (2013.01); G01N 21/9501 (2013.01); G03F 7/7065 (2013.01); G03F 7/70916 (2013.01); G03F 9/7026 (2013.01); G01S 17/48 (2013.01);
Abstract

A foreign substance detection method includes: judging the presence/absence of a foreign substance by measuring a surface condition of a substrate; measuring a surface condition of a second substrate different from the substrate upon replacing the substrate on the chuck with the second substrate, when it is judged in the judging that a foreign substance exists; and determining whether an adhering location of the foreign substance determined to exist in the judging is the substrate, based on a measurement result obtained in the measurement.

Find Patent Forward Citations

Nakamura, Tadao. (2017). Foreign substance detection method, foreign substance detection apparatus, exposure method, and method of manufacturing device (U.S. Patent No. 9599903). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9599903

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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