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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9599897 B1

PDFFull Text
Date of Patent:
Mar. 21, 2017

Filed:

Aug. 25, 2015

Salt, resin, resist composition and method for producing resist pattern

Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Takashi Nishimura, Osaka, JP;

Yuko Mukai, Osaka, JP;

Koji Ichikawa, Osaka, JP;

Assignee:

SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Sin Lee

Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); G03F 7/32 (2006.01); G03F 7/16 (2006.01); G03F 7/38 (2006.01); G03F 7/039 (2006.01); C08F 220/18 (2006.01); C08F 12/22 (2006.01); C08F 12/26 (2006.01); C08F 12/30 (2006.01); C08F 12/14 (2006.01); C08F 12/20 (2006.01); C07C 311/48 (2006.01); C07C 381/12 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 311/48 (2013.01); C07C 381/12 (2013.01); C08F 12/14 (2013.01); C08F 12/20 (2013.01); C08F 12/22 (2013.01); C08F 12/26 (2013.01); C08F 12/30 (2013.01); C08F 220/18 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); G03F 7/168 (2013.01); G03F 7/2041 (2013.01); G03F 7/30 (2013.01); G03F 7/32 (2013.01); G03F 7/38 (2013.01); C07C 2103/74 (2013.01);
Abstract

A salt represented by the formula (I); wherein Qand Qeach independently represent a fluorine atom or a Cto Cperfluoroalkyl group, Lrepresents a single bond or a divalent Cto Csaturated hydrocarbon group where a methylene group may be replaced by an oxygen atom or a carbonyl group and where a hydrogen atom may be replaced by a hydroxyl group or a fluorine atom, and Y represents a hydrogen atom, a fluorine atom, or an optionally substituted Cto Calicyclic hydrocarbon group where a methylene group may be replaced by an oxygen atom, a carbonyl group or a sulfonyl group; and Ar represents a divalent Cto Caromatic hydrocarbon group, and Zrepresents an organic sulfonium cation or an organic iodonium cation.

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