The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
Sep. 05, 2014
Ushio Denki Kabushiki Kaisha, Tokyo, JP;
Christof Metzmacher, Aachen, DE;
Hermann Giese, Aachen, DE;
Achim Weber, Aachen, DE;
Hironobu Yabuta, Gotenba, JP;
Rolf Theo Anton Apetz, Aachen, DE;
Tatsushi Igarashi, Tokyo, JP;
Hiroto Sato, Himeji, JP;
Noritaka Ashizawa, Yokohama, JP;
USHIO DENKI KABUSHIKI KAISHA, Tokyo, JP;
Abstract
Disclosed herein a rotational type foil trap that is capable of avoiding the transmission rate of the EUV light to be lowered even when the EUV light source operates with the high input power and also suppressing the temperature increase of the foil to attain a sufficient life duration. In the rotational type foil trap, one end of each of foils is inserted into each of a plurality of grooves provided on a side face of a center support, and the center support and the each of the foils are fixed together by brazing.