The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
Nov. 17, 2015
Applicant:
Seiko Instruments Inc., Chiba-shi, Chiba, JP;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 33/07 (2006.01); H01L 43/14 (2006.01); H01L 43/06 (2006.01); H01L 43/12 (2006.01);
U.S. Cl.
CPC ...
G01R 33/077 (2013.01); G01R 33/07 (2013.01); G01R 33/072 (2013.01); G01R 33/075 (2013.01); H01L 43/065 (2013.01); H01L 43/06 (2013.01); H01L 43/12 (2013.01); H01L 43/14 (2013.01);
Abstract
Provided is a highly sensitive vertical Hall element without increasing a chip area. In the vertical Hall element, trenches each filled with an insulating film are formed between a first current supply end and voltage output ends, respectively, which enables the restriction of current flow into the voltage output ends to increase the ratio of a current component perpendicular to a substrate surface, resulting in enhanced sensitivity.