The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
Apr. 06, 2015
Applicant:
Smc Corporation, Chiyoda-ku, JP;
Inventors:
Assignee:
SMC CORPORATION, Chiyoda-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
F16K 3/02 (2006.01); F16K 3/18 (2006.01); F16K 27/04 (2006.01); F16K 51/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16K 3/0218 (2013.01); F16K 3/0281 (2013.01); F16K 3/184 (2013.01); F16K 27/044 (2013.01); F16K 51/02 (2013.01); H01L 21/67126 (2013.01);
Abstract
In a valve box that makes up a gate valve, a balance room is disposed on one side wall that faces toward a processing chamber. In the balance room, a first seal member is provided to surround a first pathway, and a second seal member is mounted on an outer edge of the balance room. Further, a balance port is formed in the balance room. The balance port communicates with an accommodating room that is formed in the interior of the valve box. In a valve closed state in which a valve disk is seated on a valve seat of the valve box, the pressure inside the accommodating room and the pressure inside the balance room are equalized or made uniform through the balance port.