The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2017

Filed:

Jun. 22, 2015
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Ryo Nawata, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); F16F 15/02 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
F16F 15/022 (2013.01); G03F 7/709 (2013.01); G03F 7/70833 (2013.01); F16F 2230/0023 (2013.01);
Abstract

A vibration control apparatus is provided that controls the vibration of a first object supported by a base, the apparatus including: a first control system including a first compensator for outputting a first operation signal representing an input to a first driving unit based on a first detection signal output by a first detector; a second control system including a second compensator for outputting a second operation signal representing an input to a second driving unit based on a second detection signal output by a second detector; and a third control system including a third compensator for outputting a third operation signal representing an input to the first driving unit based on a signal relating to the second control system so as to compensate the vibration of the base.


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