The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2017

Filed:

Oct. 19, 2012
Applicant:

Adixen Vacuum Products, Annecy, FR;

Inventors:

Julien Palisson, Sillingy, FR;

Arnaud Favre, Annecy, FR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04C 19/00 (2006.01); F04C 23/00 (2006.01); F04B 37/02 (2006.01); F04B 37/14 (2006.01); B01D 53/32 (2006.01); B01D 53/68 (2006.01);
U.S. Cl.
CPC ...
F04C 19/004 (2013.01); B01D 53/323 (2013.01); B01D 53/68 (2013.01); F04B 37/02 (2013.01); F04B 37/14 (2013.01); F04C 23/003 (2013.01); B01D 2257/204 (2013.01); B01D 2257/2045 (2013.01); B01D 2257/2066 (2013.01); B01D 2258/0216 (2013.01); B01D 2259/818 (2013.01); F04C 2220/10 (2013.01); Y02C 20/30 (2013.01);
Abstract

A device for pumping and treating gases is disclosed. The device features a stator having a plurality of pumping stages connected in series one after another between a suction side and a delivery side by the inter-stage ducts. The device also includes an inner tube and a blind outer tube, the tubes inserted one inside the other and made of ceramic material, the inner tube connected to the delivery side of the rotor housing of a pumping stage and the outer tube connected to the stator and communicating with at least one inter-stage duct formed in the stator, the tubes defining a path for the pumped gases. The device also includes a plasma source located outside the stator to generate a plasma in the path of the pumped gases.


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