The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
May. 20, 2013
Air Products and Chemicals Inc., Allentown, PA (US);
Charles Michael Birtcher, Valley Center, CA (US);
Thomas Andrew Steidl, Escondido, CA (US);
Xinjian Lei, Vista, CA (US);
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
AIR PRODUCTS AND CHEMICALS, INC., Allentown, PA (US);
Abstract
A vessel for conveying a precursor-containing fluid stream from a precursor material contained within the vessel, the vessel comprising: an interior volume defined by a top, one or more sidewalls, and a base; and at least one fluid outlet for vaporized precursor, and at least one particle barrier that defines at least one particle restricted space within the interior volume, wherein said particle barrier comprises at least one 3-dimensional filter. A method for using the apparatus is also disclosed.