The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
Sep. 23, 2011
Applicants:
Ah-ram Lee, Suwon-si, KR;
Kwan-young Han, Suwon-si, KR;
Inventors:
Ah-Ram Lee, Suwon-si, KR;
Kwan-Young Han, Suwon-si, KR;
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/10 (2006.01); B24B 37/013 (2012.01); B24B 49/12 (2006.01); C03C 15/00 (2006.01); C03C 15/02 (2006.01); G01B 11/02 (2006.01); H01L 21/67 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
C03C 15/02 (2013.01); B08B 3/102 (2013.01); B24B 37/013 (2013.01); B24B 49/12 (2013.01); C03C 15/00 (2013.01); G01B 11/0683 (2013.01); H01L 21/67057 (2013.01);
Abstract
An apparatus for etching a glass substrate includes a vessel configured to contain an etchant; a first plate in the vessel and configured to receive a horizontally placed glass substrate thereon; and a circulating unit in the vessel facing the first plate and configured to create a flow of the etchant on a side of the first plate.