The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
May. 23, 2011
Applicants:
Harunobu Matsui, Joetsu, JP;
Daijitsu Harada, Joetsu, JP;
Masaki Takeuchi, Joetsu, JP;
Inventors:
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/00 (2006.01); B24B 49/00 (2012.01); C03C 3/06 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); C03C 19/00 (2006.01); G03F 1/60 (2012.01); G03F 7/00 (2006.01); G03F 1/24 (2012.01);
U.S. Cl.
CPC ...
C03C 3/06 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); C03C 19/00 (2013.01); G03F 1/60 (2013.01); G03F 7/0002 (2013.01); C03C 2201/42 (2013.01); C03C 2204/08 (2013.01); G03F 1/24 (2013.01); Y10T 428/24355 (2015.01);
Abstract
A synthetic quartz glass substrate has a surface of 6 inch squares including a central surface area of 132 mm squares. The central surface area of 132 mm squares has a flatness of up to 50 nm. A frame region obtained by subtracting the central surface area of 132 mm squares from the central surface area of 148 mm squares has a flatness of up to 150 nm.