The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 14, 2017

Filed:

Jan. 05, 2015
Applicant:

Fairchild Semiconductor Corporation, San Jose, CA (US);

Inventors:

Joseph A. Yedinak, Mountain Top, PA (US);

Jaegil Lee, Kyounggi-do, KR;

Chongman Yun, Seoul, KR;

Praveen Muraleedharan Shenoy, Pune, IN;

Christopher L. Rexer, Mountain Top, PA (US);

Assignee:

Fairchild Semiconductor Corporation, South Portland, ME (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 21/265 (2006.01); H01L 21/306 (2006.01); H01L 29/739 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/10 (2006.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66712 (2013.01); H01L 21/02532 (2013.01); H01L 21/26513 (2013.01); H01L 21/30604 (2013.01); H01L 29/0634 (2013.01); H01L 29/1075 (2013.01); H01L 29/7395 (2013.01); H01L 29/7397 (2013.01); H01L 29/7811 (2013.01); H01L 29/7813 (2013.01); H01L 29/0615 (2013.01); H01L 29/0696 (2013.01); H01L 29/0878 (2013.01); H01L 29/1095 (2013.01); H01L 29/404 (2013.01); H01L 2924/0002 (2013.01);
Abstract

In one general aspect, a power device can include an active region having a plurality of pillars of a first conductivity type alternately arranged with a plurality of pillars of a second conductivity type. The power device can include a termination region surrounding at least a portion of the active region and can have a plurality of pillars of the first conductivity type alternately arranged with a plurality of pillars of the second conductivity type. Each of the plurality of pillars of the first conductivity type in the active region and the termination region can be defined by a trench. The power device can include an enrichment region at a bottom portion of one of the plurality of pillars of the first conductivity type in the active region.


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