The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2017
Filed:
Apr. 18, 2016
Applicant:
Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;
Inventors:
Tomohiro Okumura, Osaka, JP;
Satoshi Suemasu, Osaka, JP;
Assignee:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01J 37/32 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67069 (2013.01); C23C 16/50 (2013.01); H01J 37/32009 (2013.01); H01J 37/3244 (2013.01); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01);
Abstract
In an inductively coupled plasma torch unit, two coils, a first ceramic block, and a second ceramic block are arranged, and an annular chamber is provided. Plasma generated in the chamber is ejected toward a substrate through an opening in the chamber. The chamber and the substrate are caused to relatively move having an orientation perpendicular to a longitudinal direction of the opening, thereby processing the substrate. A shield cylinder is disposed around the coil inside a rotating cylindrical ceramic tube, thereby making it possible to achieve compatibility of ignitibility and shielding properties.