The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2017
Filed:
Mar. 21, 2013
Nikon Corporation, Tokyo, JP;
Yasuhiro Hidaka, Tokyo, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A surface position detecting apparatus includes a light projection system that projects a beam from an oblique direction onto a detection target surface, and a light reception system that receives a beam reflected on the detection target surface, said surface position detecting apparatus adapted to detect a surface position of the detection target surface based on an output from the light reception system. At least one of the light projection system and the light reception system includes a total reflection prism member including an internal reflection surface which totally reflects an incident beam. Upon detection of the surface position of the detection target surface, a refractive index of an optical material forming the total reflection prism member and an angle of incidence of the incident beam to the internal reflection surface of the total reflection prism member are set so as to satisfy a predetermined relation.