The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2017
Filed:
Aug. 25, 2015
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Shinichi Hirano, Utsunomiya, JP;
Assignee:
CANON KABUSHIKI KAISHA, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03B 27/60 (2006.01); G03F 7/20 (2006.01); H01L 21/683 (2006.01); G03F 7/32 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70733 (2013.01); G03F 7/20 (2013.01); G03F 7/32 (2013.01); G03F 7/707 (2013.01); G03F 7/70725 (2013.01); G03F 7/70758 (2013.01); G03F 7/70775 (2013.01); H01L 21/67748 (2013.01); H01L 21/6838 (2013.01); H01L 21/6875 (2013.01);
Abstract
A processing apparatus that performs processing to a wafer is provided, the processing apparatus comprising a wafer chuck disposed on a stage and that holds the wafer; three pins that attract the wafer and move the wafer from the wafer chuck; and a control unit that is configured to stop or decrease the attraction of the three pins based on information about a through hole of the wafer when the wafer is moved from the wafer chuck by the three pins.