The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 14, 2017

Filed:

Mar. 27, 2014
Applicants:

Imec, Leuven, BE;

King Abdulaziz City for Science and Technology, Riyadh, SA;

Inventors:

Mahmoud A. Farghaly, Assiut, EG;

Veronique Rochus, Liege, BE;

Xavier Rottenberg, Kessel-lo, BE;

Hendrikus Tilmans, Maasmechelen, BE;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 33/02 (2006.01); G01R 33/028 (2006.01); G01R 15/24 (2006.01); G01R 33/00 (2006.01); G06F 17/50 (2006.01); G01V 3/08 (2006.01); G01V 3/40 (2006.01);
U.S. Cl.
CPC ...
G01R 33/0286 (2013.01); G01R 15/245 (2013.01); G01R 33/0005 (2013.01); G01R 33/028 (2013.01); G01R 33/0283 (2013.01); G06F 17/5086 (2013.01); G01V 3/087 (2013.01); G01V 3/40 (2013.01);
Abstract

A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.


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